Magnetische Mikrosysteme für Wandleranwendungen. Magnetic Micro Electro-mechanical Systems (MEMS) for Transducer Applications
| Categories |
Konferenz (reviewed) |
| Year | 2009 |
| Authors | H.H. Gatzen, C. Ruffert, M.C. Wurz, E. Flick |
| Published in | Proc. MST-Kongress 2009, Berlin, Deutschland, S.425-428 |
