Institute of Micro Production Technology Research Publications
Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head

Improved Fabrication of an Integrated Electromagnetic Second Stage Microactuator for a Hard Disk Recording Head

Categories Verschiedenes
Year 2009
Authors H. Saalfeld, D. Dinulovic, H.H. Gatzen
Published in Proc. (CD), ASME IMECE 2009, IMECE2009-11076, pp. 1-8, Lake Buena Vista, FL, USA