Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable Lens
| Categories |
Konferenz (reviewed) |
| Year | 2014 |
| Authors | D. Hoheisel, L. Rissing |
| Published in | Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 897305, San Francisco, USA |
