Direct hot embossing of micro-elements by means of photostructurable polyimide
Categories |
Zeitschriften/Aufsätze (reviewed) |
Year | 2016 |
Authors | M. Akin, M. Rezem, M. Rahlves, K. Cromwell, B. Roth, E. Reithmeier, M. Wurz, L. Rissing, H.-J. Maier |
Published in | Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) |