Institute of Micro Production Technology Research Publications
Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate

Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate

Categories Zeitschriften/Aufsätze (reviewed)
Year 2016
Authors Johannes Rittinger, Piriya Taptimthong, Lisa Jogschies, Marc C. Wurz, Lutz Rissing
Published in Microsystem Technologies: 1-6.
DOI 10.1007/s00542-015-2792-0