Stress Reduction in sputtered thin NiFe 81/19 layers for Magnetic Field Sensor
| Categories |
Konferenz (reviewed) |
| Year | 2016 |
| Authors | Jogschies L, Rittinger J,Klaas D, Wurz MC |
| Published in | 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 162-168 |
| DOI | 10.1016/j.protcy.2016.08.022 |
| More info | |
