Micromechanical, rotating device with a magnetic drive and method for the production thereof
Categories |
Patentschriften |
Year | 2000 |
Authors | H.-H. Gatzen |
Published in | WO 0247241 A1 |
Categories |
Patentschriften |
Year | 2000 |
Authors | H.-H. Gatzen |
Published in | WO 0247241 A1 |