Institute of Micro Production Technology Research Publications
Proof of Concept: Glass-Membrane Based Differential Pressure Sensor

Proof of Concept: Glass-Membrane Based Differential Pressure Sensor

Categories Konferenz (reviewed)
Year 2021
Authors A. Glukhovskoy, M. Prediger, J. Schäfer, N. Ambrosius, A. Vogt, R. Santos, R. Ostholt, M. C. Wurz
Published in 2021 IEEE 71st Electronic Components and Technology Conference (ECTC)
DOI DOI 10.1109/ECTC32696.2021.00248