Proof of Concept: Glass-Membrane Based Differential Pressure Sensor
Categories |
Konferenz (reviewed) |
Year | 2021 |
Authors | A. Glukhovskoy, M. Prediger, J. Schäfer, N. Ambrosius, A. Vogt, R. Santos, R. Ostholt, M. C. Wurz |
Published in | 2021 IEEE 71st Electronic Components and Technology Conference (ECTC) |
DOI | DOI 10.1109/ECTC32696.2021.00248 |