Institute of Micro Production Technology Research Publications
Optical Platform for Highly Precise Optical Components

Optical Platform for Highly Precise Optical Components

Categories Konferenz (reviewed)
Year 2020
Authors S. Bengsch, E. C. Fischer, S. de Wall, T. Schelm, M. Arndt, M. C. Wurz
Published in IEEE 70th Electronic Comp. and Techn. Conf. (ECTC)
DOI 10.1109/ECTC32862.2020.00341