Institute of Micro Production Technology Research Publications
Development, Characterisation and High-Temperature Suitability of Thin-Film Strain Gauges Directly Deposited with a New Sputter Coating System

Development, Characterisation and High-Temperature Suitability of Thin-Film Strain Gauges Directly Deposited with a New Sputter Coating System

Categories Zeitschriften/Aufsätze (reviewed)
Year 2020
Authors Klaas D, Ottermann R, Dencker F, Wurz MC
Published in MDPI Sensors
DOI 10.3390/s20113294