Research at the Institute of Micro Production Technology

© IMPT / Fischer

Design, Simulation, Manufacturing - Tomorrows Microtechnology

With our research, we want to overcome previous limits of micro production technology and develop systems that meet the newest requirements. We investigate how microtechnology can be used for small quantities, how measurements are possible under the most adverse conditions and how integration will look like in the future. To close these gaps, we pursue a holistic approach of a microtechnical process chain.

Design, Simulation, Manufacturing - Tomorrows Microtechnology

With our research, we want to overcome previous limits of micro production technology and develop systems that meet the newest requirements. We investigate how microtechnology can be used for small quantities, how measurements are possible under the most adverse conditions and how integration will look like in the future. To close these gaps, we pursue a holistic approach of a microtechnical process chain.

Quantum technology represents one of the key technologies of the 21st century. The expertise of our research group in this context includes micro- and nanotechnologically fabricated quantum systems and optical systems, among others, for the fields of quantum metrology and geodesy. In this context, polymer-based substrate materials and the associated relevant processes are also increasingly being used. The focus here is not only basic research but also on the transition to commercial products. The path from laboratory operation to mobile applications in the field or on board of aircrafts or satellites requires miniaturization of the overall system. The vision is to evolve from a micro-electro-mechanical system (MEMS) to a micro-quantum system (MQS) that combines all the functions needed to operate a quantum system. In addition to the core component (e.g. atom chip), this also includes all peripheral systems.

In the context of digitization, the acquisition of process data in a modern production environment plays a central role. On the one hand, basic research provides a deeper understanding of the technical process and on the other hand, process parameters can be optimized with regard to resource-efficient production. The customized development of novel sensors as a link between the process and the digital world is therefore one of the core tasks of the research division for Micro- and Nanointegration.

Furthermore, biomedical applications are the subject of research, which are based on magnetic sensor and actuator technologies. These include, for example, the integration of pressure sensors in flexible tissue-like and biocompatible materials or the excitation of the human cochlea as a hearing aid.
In addition, general topics of magnetics also fall into our field, such as the construction of microinductors, transformers and measuring systems or instruments, whereby we prefer to conduct application-oriented research and therefore seek proximity to industry.

Diamond has a number of unique material properties such as: excellent biocompatibility, hardness, wear resistance, transparency, chemical stability, and thermal conductivity. In addition, diamond is gaining more and more importance in fundamental research as a functional material in MOEMS, MEMS, and NEMS, with tailored optical and electrical properties. Applications include biosensors, transparent electrodes, photochemical systems, and quantum optical devices. An interdisciplinary alliance (HARD) of outstanding institutes, scientists, and researchers has been formed at the LUH and the MHH, which have a high-quality contribution in application-oriented research on diamond-functionalized devices and systems. The use of diamond will strengthen the existing research priorities and the coordinated research projects through a special infrastructure project, so that future innovative leaps are secured through the integration of diamond as a functional material in the participating research disciplines. This will be achieved through the procurement and commissioning of a production line for the manufacture, structuring, functionalization and integration of diamond coatings, which will enable higher performance and novel functions in existing and future systems.