Dicing Process for the Device Separation of a Slider with an Integrated Microactuator (SLIM)
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2008 |
| Autoren | S. Cvetkovic, H. Saalfeld, H.H. Gatzen |
| Veröffentlicht in | Proc. ASPE 23rd Ann. Meet. 2008 and 12th ICPE, Portland, OR, USA, pp. 380-383 |
