Optimization of the Adhesion of Diamond-like Carbon on Glass Substrates for Microelectro Mechanical Systems by Nanoindentational Studies
Kategorien |
Konferenz (reviewed) |
Jahr | 2008 |
Autorinnen/Autoren | F. Pape, H.H. Gatzen |
Veröffentlicht in | Leeds-Lyon Symposium on Tribology 2008, Leeds, UK |