Institut für Mikroproduktionstechnik Forschung Publikationen
Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding

Ultra-precision Dicing Process Separation: Effect of Circumferential and Sidewall Grinding

Kategorien Konferenz (reviewed)
Jahr 2012
Autorinnen/Autoren M. Stompe, S. Cvetkovic, P. Taptimthong, L. Rissing
Veröffentlicht in Proc. 12th euspen Int. Conf. 2012, Stockholm, Sweden, pp. 169-172