Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2014 |
| Autoren | D. Klaas, P. Taptimthong, L. Jogschies, L. Rissing |
| Veröffentlicht in | Procedia Technology, Vol. 15, pp. 114–121 |
| DOI | 10.1016/j.protcy.2014.09.062 |
