Institut für Mikroproduktionstechnik Forschung Publikationen
Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces

Component Integrated Sensors: Deposition of Thin Insulation Layers on Functional Surfaces

Kategorien Konferenz (reviewed)
Jahr 2014
Autorinnen/Autoren D. Klaas, P. Taptimthong, L. Jogschies, L. Rissing
Veröffentlicht in Procedia Technology, Vol. 15, pp. 114–121
DOI 10.1016/j.protcy.2014.09.062