Dicing study for high productive micro production of porcelain-based ceramic for MEMS
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2013 |
| Autorinnen/Autoren | M. Stompe, S. Cvetkovic, L. Rissing |
| Veröffentlicht in | Proc.13th euspen Int. Conf., Berlin, Germany, pp. 92-95 |
