ForschungPublikationen
Roughness Standards for the Calibration of SPM- from Design to Comparison Measurement

Roughness Standards for the Calibration of SPM- from Design to Comparison Measurement

Kategorien Konferenz (reviewed)
Jahr 2001
Autoren H.H. Gatzen, C. Kourouklis, R. Krüger-Sehm
Veröffentlicht in Proc. 5th Seminar on Quantitative Microscopy, Nanoscale 2001, Bergisch Gladbach, pp. 7-13