ForschungPublikationen
Alternatives for Fabricating Aerostatic Micro Guides

Alternatives for Fabricating Aerostatic Micro Guides

Kategorien Konferenz (reviewed)
Jahr 2007
Autoren C. Ruffert, H.H. Gatzen
Veröffentlicht in Proc. Smart Systems Integration 2007, European Conference & Exhibition on integration issues of miniaturized systems – MEMS, MOEMS, ICs and electronic components, Paris, France, pp. 604-607