ForschungPublikationen
Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk Material

Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk Material

Kategorien Konferenz (reviewed)
Jahr 2006
Autoren H.H. Gatzen, S. Cvetkovic
Veröffentlicht in Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria