Institut für Mikroproduktionstechnik Forschung Publikationen
Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

A Concept for a Toolbox of Components for Modular Magnetic Microsensors

Kategorien Zeitschriften/Aufsätze
Jahr 2007
Autoren H.H. Gatzen, S. Hansen, L. Rissing
Veröffentlicht in Symposium on Magnetic Materials, Processes and Devices, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006, ecs transactions, Vol. 3, Issue 25, pp. 235-246