ForschungPublikationen
Tribological Investigation of CMP for Electroplated NiFe Microstructures

Tribological Investigation of CMP for Electroplated NiFe Microstructures

Kategorien Konferenz (reviewed)
Jahr 2008
Autoren D. Miletic, S. Cvetkovic, C.-T. Weber, H.H. Gatzen
Veröffentlicht in Proc. euspen 8th, Int. Conf. 2008, Zurich, Switzerland, Vol. 1, pp. 138-142