Institut für Mikroproduktionstechnik Forschung Publikationen
Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

Optodic bonding of optoelectronic components in transparent polymer substrates-based flexible circuit systems

Kategorien Konferenz (reviewed)
Jahr 2015
Autoren Yixiao Wang, Meriem Akin, Lisa Jogschies, Ludger Overmeyer, Lutz Rissing
Veröffentlicht in Proc. SPIE 9366, Smart Photonic and Optoelectronic Integrated Circuits XVII, 936609 (February 27, 2015)
DOI 10.1117/12.2077072