Institut für Mikroproduktionstechnik Forschung Publikationen
Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

Blade Wear and Sidewall Quality by Dicing of Sintered Silicon Carbide (SSiC)

Kategorien Konferenz (reviewed)
Jahr 2011
Autoren M. Stompe, S. Cvetkovic, L. Rissing
Veröffentlicht in Proc. 11th Euspen International Conf. 2011, Como, Italy, pp. 333-336, 2011