ForschungPublikationen
Planarization of Refrigerated Material Composites for MEMS

Planarization of Refrigerated Material Composites for MEMS

Kategorien Konferenz (reviewed)
Jahr 2011
Autoren S. Cvetkovic, L. Rissing
Veröffentlicht in Proc. 11th euspen Int. Conf. 2011, Como, Italy, pp. 188-191