Planarization of Refrigerated Material Composites for MEMS
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2011 |
| Autoren | S. Cvetkovic, L. Rissing |
| Veröffentlicht in | Proc. 11th euspen Int. Conf. 2011, Como, Italy, pp. 188-191 |
