Institut für Mikroproduktionstechnik Forschung Publikationen
Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

Using Magnetooptical Measurements for the Evaluation of a Hybrid Magnetic Shape Memory (MSM) Based Microactuator

Kategorien Konferenz (reviewed)
Jahr 2010
Autoren B. Spasova, M. C. Wurz, C. Ruffert, J. Norpoth, Ch. Jooss, H.H. Gatzen
Veröffentlicht in Transactions on Magnetics, Vol. 46, Issue 6, pp. 2256-2259, 2010