ForschungPublikationen
Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Resistance of Multilayer Diamond-like Carbon (DLC) Coatings for MEMS Applications against Oscillating Wear

Kategorien Konferenz (reviewed)
Jahr 2009
Autoren F. Pape, H.H. Gatzen
Veröffentlicht in Proc. WTC 09, Kyoto, Japan, G-114, pp.112