ForschungPublikationen
Qualification of Membranes for MEMS Applications Applying Nanoindentation

Qualification of Membranes for MEMS Applications Applying Nanoindentation

Jahr 2010
Autoren F. Pape, T. Creutzburg, and H.H Gatzen
Veröffentlicht in Nanobrücken / Hysitron User Meeting, pp. 57-58, Saarbrücken, Germany, 2010