ForschungPublikationen
Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable Lens

Thin Film Fabrication and System Integration Test Run for a Microactuator for a Tuneable Lens

Kategorien Konferenz (reviewed)
Jahr 2014
Autoren D. Hoheisel, L. Rissing
Veröffentlicht in Proc. SPIE 8973, Micromachining and Microfabrication Process Technology XIX, 897305, San Francisco, USA