Institut für Mikroproduktionstechnik Forschung Publikationen
Slurry Comparison for Chemical-mechanical Polishing (CMP) of Silicon Carbide (SiC)

Investigation for thinning-by-dicing of sintered and unsintered ceramics

Kategorien Konferenz (reviewed)
Jahr 2016
Autoren M. Stompe, E. Asadi, L. Rissing, M. C. Wurz
Veröffentlicht in 16th International Conference & Exhibition proceedings, pp. 325-326, Notthingham, June 2016