Glass-Extraction Electrode for Field Emission Applications

verfasst von

Aleksandra M. Buchta, Alexander Kassner, Folke Dencker, Marc C. Wurz

Abstract

This work focuses on designing and fabricating an optimized extraction electrode made out of borofloat glass. The electrode is a part of an emitter chip, where the field emitters are manufactured by the wafer dicing technique. The extraction electrode was fabricated by Selective Laser Etch (SLE) process, where the geometry comprises an array of Through-Glass-Vias (TGV) that are positioned concentrically over each emitter tip, a cavity in the area of the TGVs, additional cavities for lowering of the electrode and TGVs for dowel pins for alignment. The current-voltage experiments confirm the enhancement in the measured field emission current dependent on the geometry of the extraction electrode.

Organisationseinheit(en)

Quantentechnologien
Institut für Mikroproduktionstechnik

Typ

Aufsatz in Konferenzband

Publikationsdatum

2024

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektronische, optische und magnetische Materialien, Instrumentierung, Elektrotechnik und Elektronik

Elektronische Version(en)

https://doi.org/10.1109/ivnc63480.2024.10652278 (Zugang: Geschlossen)
https://doi.org/10.15488/18943 (Zugang: Offen)