Manufacturing and Characterization of Piezoelectric Force Sensor Arrays for Investigation of Ultrasonic Wire Bonding

verfasst von

Matthias Arndt, Yangyang Long, Chengyan Hu, Folke Dencker, Jens Twiefel, Marc Christopher Wurz

Abstract

Ultrasonic (US) wire bonding is a very complex process. Different mechanisms occur at different locations of the bonding interface in a very short time making a spatially resolved investigation of the process extremely difficult. As a result the local mechanisms stay unclear. Therefore, a novel 3×4 force sensor array has been developed for the in-situ investigations of the ultrasonic wire bonding process. The array is based on the piezoelectric ceramic lead zirconate titanate (PZT), which is first divided into individual sensor columns via precision dicing and then filled with a polymer. Each of these columns acts as a single sensor of the array with a sensing area of 360×160 μm². The array was used to measure the local tangential forces, which occur at the contact region between the wire and the substrate during the bonding process. To be able to detect the local effects even more precisely a sensor array with smaller elements has been developed recently. Building on the existing design, the new version of the array now features 4×12 sensors with a sensing area of 100×100 μm² while maintaining the same total size of around 1600×500 µm² as before. This work presents the manufacturing and characterization of the new sensor array, which promises in-situ measurements of the bonding process with enhanced resolution.

Organisationseinheit(en)

Institut für Mikroproduktionstechnik
Institut für Dynamik und Schwingungen

Typ

Aufsatz in Konferenzband

Seiten

462-465

Anzahl der Seiten

4

Publikationsdatum

2023

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektrotechnik und Elektronik, Elektronische, optische und magnetische Materialien, Oberflächen, Beschichtungen und Folien, Physik der kondensierten Materie, Atom- und Molekularphysik sowie Optik

Elektronische Version(en)

https://doi.org/10.15488/18555 (Zugang: Offen)