Magnetic micro and nano actuator systems

verfasst von

H. H. Gatzen

Abstract

Magnetic micro and nano actuators excel in robustness, achieve considerable travel at decent forces, and operate at low voltage. However, compared to electrostatic micro and nano actuators (their main competitors), they typically are more complex. Nevertheless, by now, there are substantial activities in the area of micro and nano actuator systems, many executed by universities. In the biomedical area, fluidic applications predominate. In the field of Computer and Communication Technology (CTT), the emphasis is in the area of MEMS RF switches/relays. In motion sensing, there are interesting activities in the area of yaw sensors, also called gyroscopes. Although sensing devices, they do require actuation. One of the fastest growing areas of magnetic MNEMS actuation is in the field of optics, with substantial activities in scanning mirrors.

Organisationseinheit(en)

Institut für Mikroproduktionstechnik

Externe Organisation(en)

Karlsruher Institut für Technologie (KIT)

Typ

Aufsatz in Konferenzband

Seiten

119-131

Anzahl der Seiten

13

Publikationsdatum

2013

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Allgemeiner Maschinenbau

Elektronische Version(en)

https://doi.org/10.1149/05010.0119ecst (Zugang: Unbekannt)