| Course Category | Lecture and Tutorial |
| Level | Grundstudium / Bachelor Hauptstudium / Master |
| Semester | Summer Semester |
| Creditpoints | 5 CP |
Course Goal
In this lecture, the basic manufacturing processes for the production and characterization of nanostructures and nanodevices are presented. In addition to manufacturing processes for nanoparticles, structuring and coating processes are also explained. Furthermore, the most important types of nanoparticles and their areas of application are presented.
Course Content
- Introduction to nanoproduction technology
- Optical lithography
- Non-optical lithography processes
- Scanning probe processes
- Nanoprecision lithography
- Coating technology
- New processes for the production of optical elements
- Carbon nanotubes
- Nanoparticle production
- Nanowires and quantum dots
- Analysis methods
Summer Term 2024
| Registration and Schedule | digitally in StudIP |
| Exam registration period | 15.05. - 31.05.2024 |
| Date of examination | 17.07.2024 | 09:00 - 11:00 |
| Manual | online in StudIP |
