"Mikro- und Nanosysteme"

The aim of this course is to provide students with an understanding of the central application areas of microtechnology. Microtechnical systems are made up of the following main components: Microsensors, microactuators, microoptics and microelectronics. The focus is on the functional principles and the integration of microtechnical systems in practical applications.

• Functional principles of microsensors and actuators
• Fundamentals of microtribology
• Applications of microsystems in the fields of:
  •  Automotive engineering
  •  Biomedical technology and industrial automation
  •  Micro-optics
  •  Quantum technology