Directly Deposited Thin-Film Strain Gauges on Curved Metallic Surfaces

verfasst von

Rico Ottermann, Daniel Klaas, Folke Dencker, Dominik Hoheisel, Sebastian Jung, Alexander Wienke, Jan Friedrich Dusing, Jurgen Koch, Marc Christopher Wurz

Abstract

This paper shows the possibility of direct deposition of strain gauge sensors on curved metallic surfaces of arbitrary size. A novel, patented sputtering system from the IMPT guarantees the manufacturing directly onto the surface of any component. By this, the need of the undesirable polymer foil and adhesive vanishes, which are both necessary for conventional sensors. Thin-film metal strain gauges thereby enable new measurement positions in harsh environments due to their minimal total thickness of under 5 m, for example in industrial applications with special needs, as they exist for drilling bottom hole assemblies. This article discusses the optimization of laser cut stainless steel shadow masks for structuring the sensor layer resulting in low resistance differences of 5.3 % for sputtered sensors. The developed constantan strain gauges show a low temperature coefficient of resistance of 74.8 ppm/°C, stability up to at least 210 °C and a k-factor of 1.98. Half-bridge measurements revealed an apparent strain of 156 m/m at 200 °C and an error of only 6 m/m when strain is applied.

Organisationseinheit(en)

Institut für Mikroproduktionstechnik

Externe Organisation(en)

Baker Hughes INTEQ
Laser Zentrum Hannover e.V. (LZH)

Typ

Aufsatz in Konferenzband

Publikationsdatum

2021

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektrotechnik und Elektronik

Elektronische Version(en)

https://doi.org/10.1109/sensors47087.2021.9639542 (Zugang: Geschlossen)