Characterization of Microtransformers with Magnetic Ni-Fe-W alloy Cores Plated at Two Different Substrate Temperatures
- verfasst von
- Brij Mohan Mundotiya, Dragan Dinulovic, Lutz Rissing, Marc Christopher Wurz
- Abstract
The electroplating technique is used to realize microtransformers on a SiO2 wafer. The magnetic core of these microtransformers is deposited at a substrate temperature of 5 °C and 21 °C, while the core material is the same. For the fabrication of the magnetic core (3 µm thick), Ni-Fe-W alloy film is utilized. These fabricated transformers show changes in performance due to variations in core properties. The transformers whose core is fabricated at substrate temperature 21 °C have a significantly higher inductance than the microtransformers whose core is fabricated at a substrate temperature of 5 °C. However, the core fabricated at 5 °C has better magnetic properties than the core fabricated at 21 °C. An impedance analyzer is employed for the characterization of transformers. A signal of 5 mA at 1 MHz is used to obtain the inductance of transformers. The maximum inductance of transformers in which cores are fabricated at 5 °C and 21 °C are 54 nH and 68 nH and almost continuous up to 30 MHz, respectively. A maximum quality factor of 3.51 is attained at 15 MHz.
- Organisationseinheit(en)
-
Institut für Mikroproduktionstechnik
- Externe Organisation(en)
-
Malaviya National Institute of Technology
Würth Elektronik eiSos GmbH & Co. KG
- Typ
- Artikel
- Journal
- Sensors and Actuators A: Physical
- Band
- 338
- ISSN
- 0924-4247
- Publikationsdatum
- 01.05.2022
- Publikationsstatus
- Veröffentlicht
- Peer-reviewed
- Ja
- ASJC Scopus Sachgebiete
- Elektronische, optische und magnetische Materialien, Instrumentierung, Physik der kondensierten Materie, Oberflächen, Beschichtungen und Folien, Metalle und Legierungen, Elektrotechnik und Elektronik
- Elektronische Version(en)
-
https://doi.org/10.1016/j.sna.2022.113454 (Zugang:
Geschlossen)
