Direct Deposition of Thin-Film Strain Gauges with a New Coating System for Elevated Temperatures

verfasst von

Rico Ottermann, Daniel Klaas, Folke Dencker, Marc Christopher Wurz, Dominik Hoheisel, Peter Rottengatter, Thomas Kruspe

Abstract

This paper shows, that in comparison to conventional polymer foil-based metal strain gauges, sputtered thin-film metal strain gauges enable new measurement positions in harsh environments because of their reduced thickness, fulfilling the modern needs of special industry applications such as drilling bottom hole assemblies. It requires the possibility to sputter directly on components of any size. This is achieved by a novel patented coating system, invented at the IMPT. Due to the direct deposition, there is potential for optimized temperature behavior and higher accuracy that should be shown in this work. After the development of Constantan strain gauges with a low temperature coefficient of resistance (TCR) of-51.5 ppm/°C and a temperature-independent k-factor of 2.05, half-bridge measurement results showed an outstanding temperature compensation capability with a corrected maximum error of just 10 μm/m up to 210 °C while being exposed to varying strain.

Organisationseinheit(en)

Institut für Mikroproduktionstechnik

Externe Organisation(en)

Baker Hughes INTEQ

Typ

Aufsatz in Konferenzband

Publikationsdatum

2020

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektrotechnik und Elektronik

Elektronische Version(en)

https://doi.org/10.1109/SENSORS47125.2020.9278661 (Zugang: Geschlossen)