Giant Magneto-Resistive Effect based Sensor on Laser Direct Structured MID Substrates

verfasst von

Eike Christian Fischer, Sebastian Bengsch, Sascha De Wall, Marc Christopher Wurz

Abstract

This paper covers the successful manufacturing of Giant Magneto-Resistive (GMR) spin valve sensors consisting of a highly precise thin film stack of partially only three nanometer thin metal layers on the high-performant polymer polyether-ether-ketone (PEEK). By means of injection molding, disk-shaped wafer-like substrates were made including meandering cavities for subsequent sputter deposition. After a polishing step, a backside contact was established using the technique of laser direct structuring. The entire production process replaces and simplifies the classical lithography and masking processes almost rendering a clean room redundant. Sensors manufactured this way on PEEK substrate show a magneto-resistive effect of 3.7 % in comparison to 7.2 % for sensors gained with the same deposition parameters on silicon dioxide.

Organisationseinheit(en)

Institut für Mikroproduktionstechnik

Typ

Aufsatz in Konferenzband

Seiten

439-444

Anzahl der Seiten

6

Publikationsdatum

2020

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektronische, optische und magnetische Materialien, Elektrotechnik und Elektronik

Elektronische Version(en)

https://doi.org/10.1109/ECTC32862.2020.00077 (Zugang: Geschlossen)