In Situ Resistance Trimming of Directly Deposited Thin-Film Strain Gauges

verfasst von

Rico Ottermann, Shuowen Zhang, Berend Denkena, Heinrich Klemme, Dennis Kowalke, Michael Korbacher, Folke Dencker, Marc Christopher Wurz

Abstract

The sensory equipment of components of large production machines plays a major role for quality monitoring. In portal milling machines, conventional foil-based strain gauges can be applied manually on guide carriages in order to measure the process forces and torques in all directions. Here, an improvement regarding accuracy, positioning and automatability concerning the sensor application is aimed by directly deposited thin-film sensors. Therefore, this article shows and evaluates a method for trimming of sputtered resistive thin-film strain gauges during their vacuum plasma fabrication process. In this way, an adjustment of the output signal of a thin-film chromium Wheatstone full-bridge circuit to 0.02 mV/V is possible, assuring a proper functionality with low apparent strain values of 6 μm/m up to temperature values of 90 °C.

Organisationseinheit(en)

Institut für Mikroproduktionstechnik
Institut für Fertigungstechnik und Werkzeugmaschinen

Externe Organisation(en)

Robert Bosch GmbH
Universität Ulm

Typ

Aufsatz in Konferenzband

Publikationsdatum

2022

Publikationsstatus

Veröffentlicht

Peer-reviewed

Ja

ASJC Scopus Sachgebiete

Elektrotechnik und Elektronik

Elektronische Version(en)

https://doi.org/10.1109/SENSORS52175.2022.9967357 (Zugang: Geschlossen)