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Logo: IMPT - Institut für Mikropoduktionstechnik
Logo Leibniz Universität Hannover
Logo: IMPT - Institut für Mikropoduktionstechnik
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Beiträge in Büchern

J. Koch, E. Fadeeva, M. Engelbrecht, C. Ruffert, H.H. Gatzen, A. Ostendorf, B.N. Chichkov (2006): Maskless Nonlinear Lithography with Femtosecond Laser Pulses, Applied Physics A: Materials Science & Processing, Springer-Verlag GmbH, A 82, pp. 23-26, ISSN: 0947-8396

Konferenz (reviewed)

D. Dinulovic, E. Flick, H. Gerdes, K. Feindt, M. Eccarius, H.H. Gatzen (2006): Concept for a Wafer Level Test System for Measuring Magnetic Film Properties, 210th Meet. of The Electrochemical Society 2006, Cancun, Mexico

D. Herrmann, D. Milletic, H.H. Gatzen (2006): Recognition of Professional Qualification for University Students in Engineering Sciences, Book of Abstract 15th Int. Ass. for Manag. of Tech. IAMOT 2006, Beijing, P.R. China

H. Gerdes, D. Dinulovic, H.H. Gatzen (2006): Electromagnetic Dual-position Actuator for Measurement Applications, Proc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 824-827

H.H. Gatzen, C. Ruffert (2006): Microcoils in Thin-film Technology, Proc. Inductica 2006, Berlin, Germany

H.H. Gatzen, C. Ruffert (2006): Advances in Magnetic Micro Thin-film Transducers, 210th Meet. of The Electrochemical Society, Cancun, Mexico, 2006

H.H. Gatzen, E. Flick (2006): Total Quality Management System for a Micro and Nano Technology Oriented University Institution, Proc. 15th Int. Ass. for Manag. of Tech. IAMOT 2006, Beijing, P.R. China

H.H. Gatzen, M. Hahn, K. Ullakko (2006): Characterization of Magnetic Shape Memory (MSM) Material and its Application in a Hybrid Micro Actuator, Proc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 406-409

H.H. Gatzen, M. Hahn, M. Bedenbecker, B. Ponick, R. Gehrking, S. Demmig (2006): Advances in the Development of a Linear Hybrid Micro Actuator, Proc. Actuator 2006, 10th Int. Conf. on New Actuators, Bremen, Germany, pp. 207-210

H.H. Gatzen, S. Cvetkovic (2006): Modeling CMP - Investigation of the Chemical Attack on the Mechanical Properties of Bulk Material, Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria

K. Halalo, H.H. Gatzen (2006): Ceramic Micro Needle Array for Painless Drug Delivery and Biological Sensing, Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria Sensing

K. Halalo, H.H. Gatzen (2006): Combining Mechanical Micromachining and Glass Bonding to Fabricate Robust Micro Structures, Proc. EUSPEN 6th Int. Conf. 2006, Baden, Austria

K.-H. Wu, O. Traisigkhachol, H.H. Gatzen (2006): Development of a MIG-Head for Magnetic Storage of Information on Machine Components, 210th Meet. of The Electrochemical Society 2006, Cancun, Mexico

M. Bedenbecker, Z. Celinski, H.H. Gatzen (2006): Directional Permeability Dependence in Electroplated Permalloy Layers, Proc. 210th Meet. of The Electrochemical Society, Cancun, Mexico, ecs transactions, Vol. 3, Issue 25, pp. 123-135

S. Hansen, L. Rissing, H.H. Gatzen (2006): A Concept for a Toolbox for Modular Magnetic Microsensors, 210th Meet. of The Electrochemical Society 2006, Cancun, Mexico

Berichte

S. Hansen, M.C. Wurz, H.H. Gatzen (2006): Baukasten multifunktionaler Mikrosensoren für Messaufgaben in der Fertigungstechnik, wt Werkzeugtechnik online, Jahrgang 96, H. 11/12, S. 866-870

Zeitschriften/Aufsätze

A. Ben Amor, T. Budde, H.H. Gatzen (2006): A Magnetoelastic Microtransformer Based Micro Strain Gauge, 5th European Magnetic Sensor & Actuator Conf. EMSA 2004, Sensors and Actuators A129 (2006) No. 1-2, pp. 41-44

C. Ruffert, M. Feldmann, S. Büttgenbach, H.H. Gatzen (2006): Fabrication of Functional Components forEelectromagnetic Microactuators, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 670-675

C. Ruffert, R. Gehrking, B. Ponick, H.H. Gatzen (2006): Magnetic Levitation Assisted Guide for a Linear Microactuator, IEEE Trans. on Magn., Vol. 42, No. 11, pp. 3785-3787

D. Dinulovic, D. Hermann, J. Flügge, H.H. Gatzen (2006): Development of a Linear Micro Inductosyn Sensor, IEEE Trans. on Magn., Vol. 42, No. 10, pp. 2830-2832

D. Dinulovic, H.H. Gatzen (2006): Microfabricated Inductive Micropositioning Sensor for Measurement of a Linear Movement, IEEE Sensors Journal, Vol. 6, No. 6, pp. 1482-1487

Imt (2006): Spritzen ohne Schmerzen, Presse Info PZH

M. Bedenbecker, H.H. Gatzen (2006): Electroplated CoFe Thin Films for Electromagnetic Microactuators, MMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08M308

M. Bedenbecker, R. Bandorf, H. Lüthje, G. Bräuer, H.H. Gatzen (2006): Development and Fabrication of Magnetic Thin Films, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 655-658

M. Hahn, R. Gehrking, B. Ponick, H.H. Gatzen (2006): Design Improvements for a Linear Hybrid Step Micro-actuator, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 646-649

M. Wurz, C. Ruffert, Z. Mrowka, S. Knappmann, H.H. Gatzen (2006): Fabrication of a Micro Coil for Magneto-Optical Data Storage, IEEE Trans. on Magn., Vol. 42, No. 10, pp. 2468-2470

R. Bandorf, R. Küster, C. Henke, H. Lüthje, J.-H. Sick, C. Neumeister, A. Phataralaoha, S. Büttgenbach, H.H. Gatzen, G. Bräuer (2006): Tribology of Microsystems, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 12, No.7, pp. 680-684

T. Budde, H.H. Gatzen (2006): Thin Film SmCo Magnets for use in Electromagnetic Microactuators, MMM 2005, San Jose, CA, USA, Journal of Applied Physics, Vol. 99, 08N304

Doktorarbeiten

Budde, Thomas  (2006): Entwicklung von Samarium-Kobalt-Magneten

Günzel, Gerald  (2006): Untersuchungen zum Dünnen und Vereinzeln dünner Siliziumwafer