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Logo: IMPT - Institut für Mikropoduktionstechnik
Logo Leibniz Universität Hannover
Logo: IMPT - Institut für Mikropoduktionstechnik
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Beiträge in Büchern

R. Bandorf, H. Lüthje, K. Schiffmann, M. Beck, H.H. Gatzen, M. Schmidt, S. Büttgenbach, G. Bräuer (2003): Submikrometerschichten für mikrotribologische Anwendungen, SFB-Kolloquium, Vulkan Verlag Braunschweig, S. 75-83

S.B. Wiendl, W.-R. Zabel, H.H. Gatzen, G. Poll: (2003): Grenzschichtuntersuchungen an schnelllaufenden fettgeschmierten Schrägkugellagern, GFT Tribologie Fachtagung 2003, Band 2, Göttingen

T. Budde, M. Föhse, B. Majjer, H. Lüthje, G. Bräuer, H.H. Gatzen (2003): Fertigung magnetischer Schichten, SFB-Kolloquium, Vulkan Verlag Braunschweig, S. 85-94

V. Seidemann, T. Kohlmeier, S. Büttgenbach, H.H. Gatzen (2003): Fertigung von Erregerspulen, SFB-Kolloquium Mikroproduktion, Vulkan Verlag Braunschweig

Konferenz (reviewed)

B. Ma, C. Morsbach, H.H. Gatzen (2003): A Novel Flying Height Measurement Approach for Optical Sliders, IEEE Proc. of AsiaSENSE 2003, Kuala Lumpur, Malaysia, pp. 29-32

C. Morsbach, N. Münter, S. Knappmann, H.H. Gatzen: (2003): Concepts for In-situ Flight Attitude Measurements of Optical Flying Heads, Proc. Innovative Mass Storage Technology Workshop (IMST) 2003, Grenoble, France, Or 41

C. Neumeister, H.H. Gatzen (2003): Combined Matrix Selection to Support the Development of Products, Proc. 12th Int. Ass. for Manag. of Tech. IAMOT 2003, Nancy, France

D. Dinulovic, T. Budde, H.H. Gatzen (2003): Design and fabrication of an inductive micro position sensor, Statusseminare BMBF-Verbundvorhaben, Microtec, München, S. 295-300

H.-W. Hoffmeister, M. Hlavac, H.H. Gatzen, C. Morsbach (2003): Mikrostrukturierung durch Schleifen, Mikromechanische Produktionstechnik, Abschlusskolloquium DFG Schwerpunktprogramm 1012. Shaker, Aachen, S. 39-54

H.H. Gatzen, C. Kourouklis (2003): Nano-Roughness Standards with a Very Low Roughness Value, Proc. euspen 4th Int. Top. Conf. 2003, Aachen, Germany, Vol. 2, pp. 495-498

H.H. Gatzen, C. Morsbach (2003): Precision Profile Grinding of High Aspect Ratio Microstructures, Proc. euspen Int. Top. Conf. 2003, Aachen, Germany, pp. 349-352

H.H. Gatzen, E. Obermeier, T. Kohlmeier, T. Budde, H.D. Ngo, B. Mukhopadhyay, M. Farr (2003): An Electromagnetically Actuated Bi-stable MEMS Optical Microswitch, Proc. Transducers 03, Boston, MA, USA, pp. 1514-1517

H.H. Gatzen, G. Günzel (2003): Optimization of Chemical Mechanical Polishing of Thin Silicon Wafers, Proc. euspen Int. Top. Conf. 2003, Aachen, Germany, Vol. 1, pp. 293-296

H.H. Gatzen, G.M Jones, C. Morsbach, G. Günzel, A. Karyazin (2003): Investigations Regarding the Interdependence of Spindle Load and Machine Performance During Slicing, Proc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, pp. 435-438

L. Zhou, M. Beck, H.H. Gatzen, G. Vurens, F. E. Talke (2003): Tribology of textured pico-slider at a flying height of 5 nm, Proc. TISD 2003, Monterey, CA, USA

L. Zhou, M. Beck, H.H. Gatzen, K. Altshuler, F. E. Talke: (2003): Slider Vibration Reduction Using Slider Surface Texture, Proc. Joint Conf. on MIPE 2003, Japan

M. Balke, H. Lüthje, T. Budde, H.H. Gatzen, G. Bräuer (2003): Non-reactive and reactive ion etching processes for patterning magnetic MEMS components, Proc. of the 2nd MICRO.tec Conf. 2003, Munich, pp. 51-52

M. Föhse, H.H. Gatzen: (2003): Erzeugung magnetischer NiFe-Dünnfilme durch galvanische Abscheidung mit Pulse-Plating, Oberflächentage 2003, DGO-Veranstaltung, Tagungsband, Bremen

M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2003): A batch fabricated linear synchronous motor, Proc. Int. Mech. Eng. Congr. and Expo IMECE 2003, Washington D.C., USA, pp. 1-8

R. Bandorf, M. Beck, H. Lüthje, J.-H. Sick, H.H. Gatzen (2003): Influence of the initial surface roughness on the wear behaviour of micro probes under rotating and oscillating flat micro contact, Proc. 2nd MICRO.tec Conf. 2003, Munich, pp. 477-478

T. Budde, H.H. Gatzen (2003): Thick Sputter Deposited NiFe 45/55 Films for Flux Guides In Magnetic MEMS, Proc. 16th Soft Magnetic Materials Conf. 2003, Düsseldorf, Germany, pp. 867-872

Zeitschriften/Aufsätze

C. Kourouklis, T. Kohlmeier, H.H. Gatzen (2003): The Application of Chemical-Mechanical Polishing for Planarizing a SU-8/Permalloy Combination Used in MEMS Devices, Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271

C. Morsbach, C. Dubarry, M. Gabriel, M. Hoyer, S. Knappmann, F. Piazza, J. Robertson, R. Vullers, H.H. Gatzen (2003): Flyable Media for Slider Based Ultra High Density Optical Recording, IEE Proc. Science, Measurement and Technology, Vol. 150, No. 5, pp. 203-206

H.H. Gatzen, C. Morsbach, C. Kourouklis (2003): Chemical-mechanical Planarization of a SU-8/Copper combination for MEMS, Proc. ASPE 18th Ann. Meet. 2003, Portland, Oregon, USA, Sensors & Actuators A: Physical, Vol. 106, No. 1-3, pp. 268-271

H.H. Gatzen, M. Beck (2003): Wear of Single Crystal Silicon as a Function of Surface Roughness, Wear, Vol. 254, No. 9, pp. 907-910

H.H. Gatzen, M. Beck (2003): Investigations on the Friction Force Anisotropy of the Silicon Lattice, Wear, Vol. 254, No. 11, pp. 1122-1126

H.H. Gatzen, M. Beck (2003): Triological Investigation of Micromachined Silicon Sliders, Tribology Int., Vol. 36, No. 4-6, pp. 279-283

L. Zhou, M. Beck, H.H. Gatzen, K. Altshuler, and F. E. Talke (2003): Dynamics of Textured Pico-Sliders during Contact Start/Stop, IEEE Trans. on Magn., Vol. 39, No.5, pp. 2426-2428