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Logo: IMPT - Institut für Mikropoduktionstechnik
Logo Leibniz Universität Hannover
Logo: IMPT - Institut für Mikropoduktionstechnik
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Beiträge in Büchern

H.H. Gatzen, C. Morsbach (2002): Minimierung der Schnittbreite beim Trennschleifen von Wafern, 60. Jahrbuch Schleifen, Honen, Läppen und Polieren, Vulkan-Verlag, Essen, pp. 301-309

Konferenz (reviewed)

D. Dinulovic, H.H. Gatzen (2002): Entwicklung eines Wegmesssensors zur Überwachung eines Mikropositionierers, Proc. 47th Internationales Wissenschaftliches Kolloquium 2002, Ilmenau, S. 673-674

H. Iswahjudi, H.H. Gatzen (2002): FEM Simulation for Design and Evaluation of an Eddy Current Microsensor, Proc. 14th European Simulation Symposium and Exhibition 2002, Dresden, Germany, pp. 201-205

H.H. Gatzen (2002): Technologien für Mikromotoren, Invited paper, Proc. MTT 2002, Erfurt, S. 37-41

H.H. Gatzen (2002): Advances in European Magnetic MEMS Technology, Invited paper, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 90-108

H.H. Gatzen, C. Morsbach, A. Karyazin (2002): High Precision Machining of a Longitudinal Bearing for a Linear Microactuator, Proc. 3rd Int. euspen Conf. 2002, Eindhoven, The Netherlands, pp. 325-328

H.H. Gatzen, C. Morsbach, A. Karyazin (2002): Mechanical Micromachining of High Aspect Ratio Microstructures, Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 562-566

H.H. Gatzen, G. Günzel (2002): Dicing of Ultra-thin Silicon Wafers, Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 557-561

H.H. Gatzen, G. M. Jones, A. Karyazin (2002): Chipping Minimization during Dicing and Slicing, Proc. ASPE 2002, 17th Ann. Meet. 2002, St. Louis, Missouri, USA, pp. 551-556

L. Zhou, M. Beck, H.H. Gatzen, K. Kato, G. Vurens, F. E. Talke (2002): The effect of Slider Texture on the Tribology of Near Contact Recording Sliders, Proc. Austrib 2002, Perth, Australia, pp. 229-126

M. Föhse, H.H. Gatzen (2002): Optimizing the Magnetic Properties of Electroplated Permalloy for Flux Guides in Micromotors, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 125-136

M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2002): Design, Fabrication, and Characterization of a Miniature Linear Asynchronous Motor, Proc. Actuator 2002, Bremen, Germany, pp. 176-179

M. Föhse, J. Edler, H.D. Stölting, H.H. Gatzen (2002): Investigations on the Pole Geometry Optimization of a Variable Reluctance Microactuator, 47. Internationales Wissenschaftliches Kolloqium, Ilmenau, Germany, pp. 215-216

T. Budde, H.H. Gatzen (2002): Magnetic Properties of Thick Sputter Deposited SmCo-Films for MEMS-Applications, Digest Intermag Europe 2002, Amsterdam, The Netherlands, GD05

T. Kohlmeier, H.H. Gatzen (2002): Ni Electroplating in SU-8 Microforms for Fabricating Self Supporting Microstructures, Proc. 7th Int. Symposium on Magnetic Materials, Processes and Devices, 202nd Meet. of The Electrochemical Society 2002, Salt Lake City, UT, USA, pp. 137-148

T. Kohlmeier, T. Budde, H.H. Gatzen (2002): Electromagnetic Bearing System for Integration in a Linear Microactuator, Proc. Eurosensors XVI, The 16th European Conf. on Solid-State Transducers 2002, Prague, Czech Republic, pp. 1217-1220

U. Gunst, S.B. Wiendl, W.-R. Zabel, H.F. Arlinghaus, H.H. Gatzen, G. Poll (2002): Characterization of High-Speed Rolling Element Bearing, Greases and Additives with TOF-SIMS, Proc. SIMS Europe, Münster, Germany, pp. 32

Zeitschriften/Aufsätze

C. Becker, A. Bartos, H.H. Gatzen (2002): Exchange Biasing of Oxidized NiFe 81/19, IEEE Trans. on Magn. Vol. 38, No. 5, pp. 2770-2772

C. Morsbach, R. Golloch, U. Kessen, G.P. Merker, H.H. Gatzen (2002): Messen in anderen Dimensionen - Entwicklung, Fertigung und Erprobung eines induktiven Miniatur-Abstandssensors, F&M Messtechnik, Carl Hanser, Munich, Vol. 110, No. 5, pp. 36-40

H.H. Gatzen, E. Andreeva, H. Iswahjudi (2002): Eddy Current Microsensor Based on Thin - film Technology, IEEE Trans. on Magn., Vol. 38, No. 5, pp. 3368-3370

J. Edler, M. Föhse, H.D. Stölting, H.H. Gatzen (2002): A Linear Microactuator with Enhanced Design, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 7, No.5-6, pp. 261-264

L. Zhou, M. Beck, H.H. Gatzen, K. Kato, G. Vurens, F. E. Talke (2002): Tribology of Textured Sliders in Near Contact Situations, IEEE Trans. on Magn., Vol. 38, No. 5, pp. 2159-2161

T. Budde, H.H. Gatzen (2002): Patterned Sputter Deposited SmCo-Films for MEMS Applications, Journal of Magnetism and Magn. Mat., Vol. 242-245

T. Kohlmeier, H.H. Gatzen (2002): Challenges in Using Photosensitive Embedding Material to Planarize Multi-layer Coils for Actuator Systems, Journal of Magnetism and Magn. Mat., Vol. 242-245, pp. 1149-1152

T. Kohlmeier, V. Seidemann, S. Büttgenbach H.H. Gatzen (2002): Application of UV Depth Lithography and 3D-Microforming for High Aspect Ratio Electromagnetic Microactuator Components, Microsystem Technologies, Springer Verlag Berlin Heidelberg New York, Vol. 8, No.4-5, pp. 304-307