Micro Measurement Technology (or Micro Metrology)
It requires extensive knowledge and equipment in the field of micro measurement technology (or micro metrology) to characterize the in-house developed and manufactured microsystems. The measurement technology is located in both the laboratories and the cleanroom at the IMPT.
The opportunities of a collaboration in research and development or in a small contract are diverse and the following only represent an overview of the possible processes at the IMPT. For your specific needs, please contact Dr.-Ing. Marc Wurz. Of course, you can also get information about the research areas, projects and facilities at the IMPT.
Surface Characterization (Roughness, Topography) / Structure Survey
White light interferometry
Profile Characterization (Roughness, Profile Height)
Profile determination with a stylus instrument
Laser triangulations-height scanner (non-contact)
Contact height scanner
Characterization of magnet materials (BH-curve, permeability)
Laser Doppler vibrometry