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Logo: IMPT - Institut für Mikropoduktionstechnik
Logo Leibniz Universität Hannover
Logo: IMPT - Institut für Mikropoduktionstechnik
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Micro Measurement Technology (or Micro Metrology)

It requires extensive knowledge and equipment in the field of micro measurement technology (or micro metrology) to characterize the in-house developed and manufactured microsystems. The measurement technology is located in both the laboratories and the cleanroom at the IMPT.

Offer Spectrum

The opportunities of a collaboration in research and development or in a small contract are diverse and the following only represent an overview of the possible processes at the IMPT. For your specific needs, please contact Dr.-Ing. Marc Wurz. Of course, you can also get information about the research areas, projects and facilities at the IMPT.

 

  • Surface Characterization (Roughness, Topography) / Structure Survey

    • Optical microscopy

    • White light interferometry

    • Confocal microscopy

    • AFM

    • REM

  • Profile Characterization (Roughness, Profile Height)

    • Profile determination with a stylus instrument

    • Laser triangulations-height scanner (non-contact)

    • Contact height scanner

  • Material Analysis

    • EDX

    • Characterization of magnet materials (BH-curve, permeability)

  • Vibration analysis

    • Laser Doppler vibrometry