Micro Measurement Technology (or Micro Metrology)
The need for the characterization of the developed and manufactured microsystems at the Institute of Micro Production Technology requires extensive knowledge and equipment in the field of micro measurement technology (or micro metrology). The measurement technology is located in both the laboratories and the cleanroom at the IMPT.
The opportunities of a collaboration in research and development or in a small contract are diversified and the following works represent only an overview of the opportunities at the IMPT. For your specific needs, please contact Dr.-Ing. Marc Wurz. Of course, you can also get information about the research areas, projects and facilities at the IMPT.
Surface Characterization (Roughness, Topography) / Structure Survey
White light interferometry
Profile Characterization (Roughness, Profile Height)
Profile determination with a stylus instrument
Laser triangulations-height scanner (non-contact)
Contact height scanner
Characterization of magnet materials (BH-curve, permeability)
Laser Doppler vibrometry