Development of Microsystems
The Institute of Micro Production Technology has a high level of experience in the development of electromagnetic effect-based microsystems. The spectrum of microsystems stretches across various types of sensor (e.g. Eddy current sensors and AMR/GMR sensors) and magnetic microactuators (e.g. biomedical and optical actuator systems and micro motors). The development of the systems involves the design by means of analytical/network-based and technical simulation methods in terms of the existing production technologies at the IMPT. The production of the systems is performed in a Class ISO 5 cleanroom.
The opportunities of a collaboration in research and development or in a small contract are diversified and the following works represent only an overview of the opportunities at the IMPT. For your specific needs, please contact Dr.-Ing. Marc Wurz. Of course, you can also get information about the research areas, projects and facilities at the IMPT.
Design of Microsystems
Simulation-based with ANSYS ®
Execution of electromagnetic simulations
Execution of thermal simulations
Execution of structural mechanical simulations
Design of Photomasks
Production of Microsystems/Technology Research
Photolithography – Positive Photoresist (e.g. AZ®9260), Negative Photoresist (e.g. SU-8™, Polymide)
Coating – Electroplating, Sputtering, Vaporization
Etching Technology – Dry Chemical (DRIE, IBE, FIB) and Wet Chemical Etching (KOH, HF)
Characterization and Reliability Analyses