Research Areas of the Institute of Micro Production Technology
The scientific core competencies of the Institute of Micro Production Technology can be divided into the following areas:
Thin Film Technology
The area of thin film technology comprises the design of microsystems/MEMS (sensors, actuators), Finite Element Methods (FEM) and production by means of processes using thin film technology. The technology used here includes photolithography as well as coating and etching processes.
In the field of mechanical micro-processing, different methods are used. First, cutting and profile-grinding processes are carried out with high-precision separation and profiling of micro components made of ceramic, glass and silicon materials. In addition, nano-scale grinding and lapping processes are carried out with high-precision surface machining of hard and brittle materials and the creation of micrographs.
In addition, processes for the production of surfaces with high quality finish and planarization of wafer surfaces made of a combination of materials through polishing and chemical-mechanical polishing (CMP) are carried out.
Packaging and System Integration
At the IMPT in the field of assembly and packaging technology, several aspects of packaging are studied, developed and applied, for the functional verification and characterization of finished sensors and actuators. The work performed in these cases applies to the electrical contacts, the joints, the connection and the micro assembly of components.
In the field of microtribology, investigations of wearing on a rotary wear measure according to the pin-on-disk process for micro surface contact are undertaken, for example. Furthermore, investigations are carried out on the micro-hardness and elastic modulus as well as the representation of adhesion and friction of thin films by means of nano-indentation and scratch tests. A determination of fracture strengths of layers is made by acoustic emission. In addition, analyses of frictional forces in micro contact are carried out.
Concepts and Training
At IMPT, concepts in the field of education and training will be developed, which aid prospective students who are returning from technical professions to pursue a university degree.