Research Areas of the Institute of Micro Production Technology
The core scientific competencies at the Institute of Micro Production Technology include the following areas:
Thin Film Technology
The area of thin film technology features the design of microsystems/MEMS (sensors, actuators) through Finite Element Methods (FEM) and their production using thin film technology processes. These include photolithography as well as coating and etching.
In the field of mechanical micro-processing, several methods are used. Cutting and profile-grinding processes on one hand, are carried out to facilitate high-precision separation and profiling of ceramic, glass and silicon micro components. On the other hand, nano-scale grinding and lapping processes are carried out to machine high-precision surfaces of hard and brittle materials or create micrographs. Additionally, production of surfaces with high quality finish as well as planarization of wafer surfaces made of a combination of materials is made possible through polishing and chemical-mechanical polishing (CMP).
Packaging and System Integration
At the IMPT, the field of assembly and packaging technology mainly researches, developes and applies several aspects of packaging for the functional verification and characterization of house-made sensors and actuators. The work performed here refers to electrical contacts and joint connection as well as the component micro assembly.
The field of microtribology focuses, for example, on investigations of wearing on a rotary wear measure according to the pin-on-disk process for micro surface contact. Furthermore, factors such as micro-hardness and elastic modulus as well as the representation of adhesion and friction of thin films are studied by means of nano-indentation and scratch tests. Acoustic emission is used to determine fracture strengths of layers. Additional analyses of frictional forces in micro contacts are also carried out.
Concepts and Training
At this institute, concepts in the field of education and training are developed, which are supposed to help prospective technical students from technical professions who want to pursue a university degree.