Roughness Standards for the Calibration of SPM- from Design to Comparison Measurement
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2001 |
| Autorinnen/Autoren | H.H. Gatzen, C. Kourouklis, R. Krüger-Sehm |
| Veröffentlicht in | Proc. 5th Seminar on Quantitative Microscopy, Nanoscale 2001, Bergisch Gladbach, pp. 7-13 |