Investigations on Eutectic Bonding of Polyimide Structures for MEMS Applications
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2013 |
| Autorinnen/Autoren | T. Creutzburg, S. Cvetkovic, J. Rittinger, L. Rissing |
| Veröffentlicht in | Smart System Integration (SSI 2013), paper 106, Amsterdam, The Netherlands |
| ISBN | 978-3-8007-3490-0 |
