Development of a Humidity Sensor Element based on sputter-deposited Thin ZnO-Layers
| Kategorien |
Konferenz (reviewed) |
| Jahr | 2016 |
| Autorinnen/Autoren | Klaas D, Rein M, Wurz MC, Rissing L |
| Veröffentlicht in | 3rd International Conference on System-integrated Intelligence: New Challenges for Product and Production Engineering, SysInt 2016, Procedia Technology 26, pp. 27-34 |
| DOI | 10.1016/j.protcy.2016.08.005 |
| Weitere Informationen | |
